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CAS 511292-99-2 | (TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM
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CAS 511292-99-2 | (TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM

CAS 511292-99-2 | (TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM

Molecular Formula: C13H33N4Ta
Molecular Weight: 426.38
Purity: 97% Min.
Package: 100 g / 1 kg / 25 kg
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Product Introduction

Specification of CAS 511292-99-2 | (TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM

ITEMS

SPECIFICATION

Fp 

64 °F

color 

yellow

form 

liquid

Sensitive 

air sensitive, moisture sensitive

density 

1.323 g/mL at 21 °C (lit.)

 

Related Articles of CAS 511292-99-2 | (TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM

Tantalum nitride atomic layer deposition using (tert-butylimido) tris (diethylamido) tantalum and hydrazine

BB Burton, AR Lavoie, SM George - Journal of the …, 2008 - iopscience.iop.org

 

New surface chemistries for the atomic layer deposition of oxides and nitrides

BB Burton - 2008 - search.proquest.com

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