CAS 308103-54-0 | TETRAKIS(ETHYLMETHYLAMINO)TITANIUM
Molecular Formula: C12H32N4Ti
Molecular Weight: 280.28
Purity: 97% Min.
Package: 100 g / 1 kg / 25 kg
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Product Introduction
Specification of CAS 308103-54-0 | TETRAKIS(ETHYLMETHYLAMINO)TITANIUM
|
ITEMS |
SPECIFICATION |
|
color |
yellow to orange |
|
storage temp. |
2-8°C |
|
form |
liquid |
|
density |
0.923 g/mL at 25 °C (lit.) |
|
Boiling point |
80 °C/0.1 mmHg (lit.) |
Related Articles of CAS 308103-54-0 | TETRAKIS(ETHYLMETHYLAMINO)TITANIUM
Atomic layer deposition of TiN films by alternate supply of tetrakis (ethylmethylamino)-titanium and ammonia
JS Min, YW Son, WG Kang, SS Chun… - Japanese journal of …, 1998 - iopscience.iop.org
Ti source precursors for atomic layer deposition of TiO2, STO and BST
R Katamreddy, V Omarjee, B Feist… - ECS …, 2008 - iopscience.iop.org
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