CAS 19824-55-6 | TETRAKIS(DIETHYLAMINO)HAFNIUM
Molecular Formula:C16H40HfN4
Molecular Weight: 467.01
Purity: 97% Min.
Package: 100 g / 1 kg / 25 kg
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Product Introduction
Specification of CAS 19824-55-6 | TETRAKIS(DIETHYLAMINO)HAFNIUM
|
ITEMS |
SPECIFICATION |
|
Melting point |
-68 °C |
|
Boiling point |
130 °C0.01 mm Hg(lit.) |
|
Fp |
50 °F |
|
form |
liquid |
|
density |
1.249 g/mL at 25 °C(lit.) |
|
color |
light yellow |
Related Articles of CAS 19824-55-6 | TETRAKIS(DIETHYLAMINO)HAFNIUM
Atomic layer deposition and characterization of hafnium oxide grown on silicon from tetrakis (diethylamino) hafnium and water vapor
A Deshpande, R Inman, G Jursich… - Journal of Vacuum …, 2004 - avs.scitation.org
Metal-organic chemical vapor deposition of HfO2 by alternating supply of tetrakis-diethylamino-hafnium and remote-plasma oxygen
S Horii, K Yamamoto, M Asai, H Miya… - Japanese journal of …, 2004 - iopscience.iop.org
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