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CAS 175923-04-3| TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
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CAS 175923-04-3| TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM

CAS 175923-04-3| TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM

Molecular Formula: C12H32N4Zr
Molecular Weight: 323.63
Purity: 97% Min.
Package: 100 g / 1 kg / 25 kg
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Product Introduction

Specification of CAS 175923-04-3 | TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM

ITEMS

SPECIFICATION

color 

light yellow

Fp 

50 °F

form 

liquid

density 

1.049 g/mL at 25 °C(lit.)

Boiling point 

81 °C0.1 mm Hg(lit.)

 

Related Articles of CAS 175923-04-3 | TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM

PEALD of zirconium oxide using tetrakis (ethylmethylamino) zirconium and oxygen

SJ Yun, JW Lim, JH Lee - Electrochemical and solid-state letters, 2004 - iopscience.iop.org

 

Novel thermally-stable hafnium and zirconium ALD precursors

A Pinchart, N Blasco, C Lachaud… - 2007 IEEE/SEMI …, 2007 - ieeexplore.ieee.org

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